ML2200 VacuLux - variable laser beam attenuator
DESCRIPTION
The variable laser beam attenuator allows continuous variation of the laser energy. The attenuator consists of a welded stainless steel vacuum housing with two DN 50 flanges at beam entrance and exit of the beam. An additional DN 16 flange sideways of the housing can be used to evacuate the housing or for purging with gas.
The system uses a dielectric beam splitter for attenuation of the beam. The displacement of the beam is compensated with neutral optical components.
The attenuation of the incoming beam can be adjusted continuously by tilting the dielectrical filter in the range of 0° to 45°.
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SPECIAL FEATURES
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TECHNICAL DATA
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Available |
Max. transmission |
Min. transmission |
Damage threshold @ 1 Hz |
|
157 nm |
> 70 % |
< 2% |
0,2 J/cm2 |
|
193 nm |
> 80 % |
< 1% |
1,0 J/cm2 |
|
248 nm |
> 90 % |
< 1% |
1,5 J/cm2 |
|
266 nm |
> 90 % |
< 1% |
2,0 J/cm2 |
|
308 nm |
> 90 % |
< 1% |
3,0 J/cm2 |
|
355 nm |
> 90 % |
< 1% |
5,0 J/cm2 |
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532 nm |
> 90% |
< 1% |
8,0 J/cm² |
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1064 nm |
> 90 % |
< 1% |
15,0 J/cm2 |
typical transmission curve: see ML2100 VariLux
Accessories:motor controller model ML 8010
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