ML7300
EUV Spectrometer 
Optical specifications
Type: Grating spectrograph with level image plane
Optical components: Aberration corrected imaging reflection grating
Entry: 2° tilt adjustment for grating
Spectral range: 1 to 21 nm (several gratings)
Spectral resolution: > 600 (depends on selection of grating, source
and detector)
Object width: app. 237 mm
Image width: app. 235 mm
Spectrum length: app. 25 to 30 mm
Spectrum width: up to 27 mm (adjustable with optional ML7300 vacuum
slit)
Generous alignment range for camera in image plane; about 50 mm with
micrometer adjustment (1 pm at 10 nm). Zero order is available for
imaging and calibration.
Mechanical specifications
Light entry flange: DN100-ISO-CF
Light exit flange: DN63-ISO (K)F or DN 6.75 inch CF
Vent: DN16 needle valve, included
Pump flange: DN63
Access for calibration: DN63
HV compatible: all materials HV compatible stainless steel and aluminium
Dimensions: 760 x 430 x 405 mm3
Weight: about 36 kg
Rotation and tilt can be adjusted with locking micrometers. The pivot
point is located on the image plane.
Accessories
• Gold coated gratings on request
• Additional mounts for gratings (recommended for fast exchange of
gratings, saves realignment)
• Application specific cameras from Roper Scientific or metrolux
• Vacuum slit ML7310 (option to use system as spectrograph)
• Vacuum flanges to adapt custom designs on request
• Calibration laser and slits for easy alignment of gratings
• Software beamlux II
• PC or laptop
• Laser synchronization device or trigger box
• Lab cart with adjustable height (900 mm x 750 mm x 800 mm)
