X-ray / EUV measurement
Metrolux offers high precision intruments and accessories for analysing light in the EUV and x-ray wavelength range for future technologies.
| EUV/X-ray camera | ML3214 |  | download |
| X-ray pinhole camera | ML3215 |  | download |
| UV- energy meter | ML7320 |
| download |
| EUV spectrometer | ML7300 |  | download |
| HV - slit | ML7310 |  | download |
ML3214 EUV/X-ray camera
Optical specifications
Camera: Analog CCD
Detector: Si with quantum converter
Spatial resolution: 50 µm
Sensor size: 6.5 mm x 8.6 mm
Pixel array: 570 x 768
Spectral range: 1 nm to 300 nm
EUV option: 6 nm to 19 nm with bandpass filter (200 nm with
zirconium filter)
Sensitivity: 500 pW/cm2
Quantum converter: K2
Dynamic range: > 150:1
Electrical specifications
Settings: manual gain, fixed gain, auto gain, shutter speed 20 ms or
1 ms
Video out: CCIR, 1 Vpp, 75 Ohm BNC
Operating voltage: DC 12 V, 250 mA max, Hirose-connector
Mechanical specifications
Mounting flange: DN63-ISO-KF (on request)
Vacuum flange: DN63-ISO-KF
Vacuum specifications: HV, stainless steel construction
Dimensions: Length: 130 mm, diameter: 80 mm
Weight: 0.9 kg (app.)
Accessories
Software: beamlux II
Computer: PC or laptop with video frame grabber
Trigger unit: LSD (laser synchronization device)
Mounting fixtures: HV adapter flanges
Metal bandpass filter: 200 µm zirconium filter (transmission: 6 to 19
nm)
ML3215 X-ray pinhole camera
Optical specifications
Camera: Pinhole camera
Spatial resolution: 25 to 80 µm (at 200 mm focal distance)
Pinhole diameter: app. 30 µm
Magnification: 1:0.5 to 1:2 zoom
Focal length: 100 - 400 mm
Object size: 350 x 480 µm2 up to 1.0 x 1.3 mm2
Sensor size: 6.5 mm x 8.6 mm
Depth of field: 20 mm to infinity
Depth of focus: 20 mm to infinity (no focussing needed)
Angular resolution: 0.006 ° = 21 mrad
Sensitivity: ~ 4.5 nW/cm2 at pinhole
Quantum converter: Type K2
Resolution: 300 x 400 pixels
Dynamic range: > 100:1
Spectral range: 6 nm to 19 nm (with 200 nm zirconium filter)
Electrical specifications
Settings: Manual gain, fixed gain, auto gain, shutter times: 20 ms or
1 ms
Video out: CCIR, 1 Vpp, 75 Ohm BNC connector
Operating voltage: DC 12 V, stabilized, 250 mA max. Hirose connector
Mechanical specifications
Mounting flange: DN100-ISO-KF
Vacuum connector: DN63-ISO-KF
Vacuum specification: HV, all stainless steel construction
Dimensions: length: 480 mm, cross section: 120 x 165 mm2
Weight: 3.6 kg
Accessories
Software: beamlux II
Computers: PC or laptop with frame grabber
Trigger units: Laser synchronization device LSD or trigger box
Mounting fixtures: HV-Adapter flanges
ML7320 UV- energy meter
Optical specifications
Detector: Si, with spatial resolution and converter coating
Spectral range: 1 nm to 300 nm
EUV option: 6 nm to 19 nm with bandpass filter (200 nm with Zirconium
filter)
Spatial resolution: app. 50 µm
Sensor size: 6.6 x 8.8 mm2
Sensitivity: app. 500 pW/cm2
Quantum converter: K2
Dynamic range: > 150:1
Electrical specifications
Settings: manual gain, fixed gain, auto gain, shutter speed 20 ms or
1 ms
Video out: CCIR, 1 Vpp, 75 Ohm BNC
Operating voltage: DC 12 V, stabilized, 250 mA, max, Hirose connector
Mechanical specifications
Mounting flange: DN63-ISO-KF
Vacuum connector: DN63-ISO-KF
Vacuum specification: HV, stainless steel construction
Length: about 130 mm, diameter app. 150 mm
Weight: app. 0.85 kg
Accessories
Software: beamlux II
Computer: PC or laptop with frame grabber
Trigger: Laser synchronization device LSD or trigger box
Calibration: Available on request
Mounting fixtures: Vacuum adaptor flanges
Alignment unit: Tool for mechanical alignment, HV compatible
ML7300 EUV spectrometer
Optical specifications
Type: Grating spectrograph with level image plane
Optical components: Aberration corrected imaging reflection grating
Entry: 2° tilt adjustment for grating
Spectral range: 1 to 21 nm (several gratings)
Spectral resolution: > 600 (depends on selection of grating, source
and detector)
Object width: app. 237 mm
Image width: app. 235 mm
Spectrum length: app. 25 to 30 mm
Spectrum width: up to 27 mm (adjustable with optional ML7300 vacuum
slit)
Generous alignment range for camera in image plane; about 50 mm with
micrometer adjustment (1 pm at 10 nm). Zero order is available for
imaging and calibration.
Mechanical specifications
Light entry flange: DN100-ISO-CF
Light exit flange: DN63-ISO (K)F or DN 6.75 inch CF
Vent: DN16 needle valve, included
Pump flange: DN63
Access for calibration: DN63
HV compatible: all materials HV compatible stainless steel and aluminium
Dimensions: 760 x 430 x 405 mm3
Weight: about 36 kg
Rotation and tilt can be adjusted with locking micrometers. The pivot
point is located on the image plane.
Accessories
• Gold coated gratings on request
• Additional mounts for gratings (recommended for fast exchange of
gratings, saves realignment)
• Application specific cameras from Roper Scientific or metrolux
• Vacuum slit ML7310 (option to use system as spectrograph)
• Vacuum flanges to adapt custom designs on request
• Calibration laser and slits for easy alignment of gratings
• Software beamlux II
• PC or laptop
• Laser synchronization device or trigger box
• Lab cart with adjustable height (900 mm x 750 mm x 800 mm)
ML7310 HV - slit
Technical specifications
Wide wavelength range from X-ray to IR
Slit width: Variable from 0 to 400 µm
Slit height: 0 to 20 mm
Slit orientation: Adjustable with tilt
Wedge shape: Adjustable with blades
Blades: stainless steel, polished optically to 45 degrees, (other
geometries available on request)
Straightness: better than 10 µm over full height
Smoothness of edge: 1 to 2 µm
Connector: DN 100 CF
Enclosure: Cylindrical flange housing diameter: 165 mm
Overall length: 50 mm, height with micrometer: 268 mm
Weight: ~ 7.5 kg
Accessories
• Vacuum seals
• Mounting screws
• Custom blades
• adjustment tools
