EUV / X-ray Camera

  • High vacuum compatible
  • Quantum converter coated onto CCD
  • Broad sensitivity range (1 nm to 300 nm, 1100 nm optional)
  • Many off the shelf accessories
  • Custom designs and digital systems available on request

UV Konverter: K2
Filter: 200 µm zirconium (transmission 6 to 19 nm)
Sensitivity: 500 pW / cm²
Mounting Flange: DN63-ISO-KF (on request)
Vakuum Flange: DN63-ISO-KF
Vakuum specifikations: HV, stainless steel construction

Wavelength: 
1 - 300 nm
Power: 
< 100 mW
Sensor Type: 
CCD 2/3"
Active Area: 
8,97 x 6,71 mm
Resolution: 
16 µm
Beam Size: 
160 µm - 5 mm
Energy Density: 
< 50 mJ/cm²
Interface: 
IEEE 1394 FireWire
Diameter: 
80 mm
Length: 
130 mm
Weight: 
900 g

As accessories PC, monitor and Laser Synchron Device (LSD) are available.

Optical specifications
Camera: Analog CCD
Detector: Si with quantum converter
Spatial resolution: 50 µm
Sensor size: 6.5 mm x 8.6 mm
Pixel array: 570 x 768
Spectral range: 1 nm to 300 nm
EUV option: 6 nm to 19 nm with bandpass filter (200 nm with
zirconium filter)
Sensitivity: 500 pW/cm2
Quantum converter: K2
Dynamic range: > 150:1

Electrical specifications
Settings: manual gain, fixed gain, auto gain, shutter speed 20 ms or 1 ms
Video out: CCIR, 1 Vpp, 75 Ohm BNC
Operating voltage: DC 12 V, 250 mA max, Hirose-connector

Mechanical specifications
Mounting flange: DN63-ISO-KF (on request)
Vacuum flange: DN63-ISO-KF
Vacuum specifications: HV, stainless steel construction
Dimensions: Length: 130 mm, diameter: 80 mm
Weight: 0.9 kg (app.)

Accessories
Software: Beamlux II
Computer: PC or laptop with video frame grabber
Trigger unit: LSD (laser synchronization device)
Mounting fixtures: HV adapter flanges
Metal bandpass filter: 200 µm zirconium filter (transmission: 6 to 19 nm)